This course will explore the techniques and applications of nanofabrication and miniaturization of devices to the smallest scale. It will be focused on the understanding of the technology of miniaturization, its history and present trends towards building devices and structures on the nanometer scale. Technology and instrumentation for nanofabrication as well as future trends will be described. Examples of applications of nanotechnology in the electronics, communications, data storage, sensing and biotechnology will be analyzed. Students will understand the underlying physics and technology, as well as limitations of miniaturization.