APh/EE 109
Introduction to the Micro/Nanofabrication Lab
Introduction to the Micro/Nanofabrication Lab
9 units (0-6-3)
|
first, second, third terms
Introduction to techniques of micro-and nanofabrication, including solid-state, optical, and microfluidic devices. Students will be trained to use fabrication and characterization equipment available in the applied physics micro- and nanofabrication lab. Topics include Schottky diodes, MOS capacitors, light-emitting diodes, microlenses, microfluidic valves and pumps, atomic force microscopy, scanning electron microscopy, and electron-beam writing.
Instructor:
Staff